https://bioengineer.org/postech-professor-yong-young-noh-resolves-two-decades-of-oxide-semiconductor-challenges-which-is-published-in-prestigious-journal-nature/

POSTECH Professor Yong-Young Noh resolves two decades of oxideProfessor Yong-Young Noh from the Department of Chemical Engineering at Pohang University of Science and Technology (POSTECH), along with Dr. Ao Liu and Dr. Huihui Zhu, postdoctoral researchers frombioengineer.org

nature


https://www.nature.com/articles/s41586-024-07360-w

Selenium alloyed tellurium oxide for amorphous p-channel transistors - NatureNature - Selenium alloyed tellurium oxide for amorphous p-channel transistorswww.nature.com

pํ˜• ๋น„์ •์งˆ ๋ฐ˜๋„์ฒด์— ๋Œ€ํ•œ ์—ฐ๊ตฌ ์ง„ํ–‰์€ ๋ˆˆ์— ๋„๊ฒŒ ๋ถ€์ง„ํ•˜๋‹ค. nํ˜• ๋น„์ •์งˆ ์‚ฐํ™”๋ฌผ ๋ฐ˜๋„์ฒด, ํŠนํžˆ OLED ๋””์Šคํ”Œ๋ ˆ์ด ๋ฐ ๋ฉ”๋ชจ๋ฆฌ ์žฅ์น˜์—์„œ ์ธ๋“ ๊ฐˆ๋ฅจ ์•„์—ฐ ์‚ฐํ™”๋ฌผ(IGZO) ๊ธฐ๋ฐ˜ ๋ฐ˜๋„์ฒด๊ฐ€ ๋„๋ฆฌ ์ฑ„ํƒ๋˜๊ณ  ์žˆ์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ  pํ˜• ์‚ฐํ™”๋ฌผ ์žฌ๋ฃŒ์˜ ๋ฐœ์ „์€ ์ˆ˜๋งŽ์€ ๊ณ ์œ  ๊ฒฐํ•จ์œผ๋กœ ์ธํ•ด ๋ฐฉํ•ด๋ฅผ ๋ฐ›์•„ ์™”์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ๋‚œ๊ด€์œผ๋กœ ์ธํ•ด ์ „์ž์†Œ์ž ๋ฐ ์ง‘์ ํšŒ๋กœ์˜ ์ดˆ์„์ด ๋˜๋Š” npํ˜• ์ƒ๋ณดํ˜• ์–‘๊ทน์„ฑ ๋ฐ˜๋„์ฒด(CMOS) ๊ฐœ๋ฐœ์ด ์–ด๋ ค์›Œ์กŒ์Šต๋‹ˆ๋‹ค. ๊ณ ์„ฑ๋Šฅ ๋น„์ •์งˆ pํ˜• ์‚ฐํ™”๋ฌผ ๋ฐ˜๋„์ฒด ์žฅ์น˜๋ฅผ ๋‹ฌ์„ฑํ•˜๋Š” ๊ฒƒ์€ ์˜ค๋žซ๋™์•ˆ ๊ฑฐ์˜ ๋ถˆ๊ฐ€๋Šฅํ•œ ๊ณผ์ œ๋กœ ์—ฌ๊ฒจ์ ธ ์™”์œผ๋ฉฐ ํ•™๊ณ„๋Š” 20๋…„ ๋™์•ˆ ์‹คํŒจํ•œ ์‹œ๋„์— ์ง๋ฉดํ•ด ์žˆ์Šต๋‹ˆ๋‹ค.

๊ทธ๋Ÿผ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ  ํฌ์Šคํ… ๋…ธ์šฉ์˜ ๊ต์ˆ˜ ์—ฐ๊ตฌํŒ€์€ '๋ถˆ๊ฐ€๋Šฅ'ํ•ด ๋ณด์ด๋Š” ๊ฒƒ์„ '๊ฐ€๋Šฅ'์œผ๋กœ ๋ณ€ํ™”์‹œ์ผฐ๋‹ค.

์—ฐ๊ตฌํŒ€์€ ์กฐ์‚ฌ๋ฅผ ํ†ตํ•ด ์‚ฐ์†Œ๊ฐ€ ๋ถ€์กฑํ•œ ํ™˜๊ฒฝ์—์„œ ํฌํ† ๋ฅ˜ ๊ธˆ์†์ธ ์‚ฐํ™”ํ…”๋ฃจ๋ฅจ์˜ ์ „ํ•˜๊ฐ€ ์ฆ๊ฐ€ํ•œ๋‹ค๋Š” ์‚ฌ์‹ค์„ ๋ฐœ๊ฒฌํ–ˆ์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ํ˜„์ƒ์€ ์‚ฐ์†Œ๊ฐ€ ์ถฉ๋ถ„ํ•˜์ง€ ์•Š์€ ์ƒํ™ฉ์—์„œ๋„ ์ „์ž๋ฅผ ์ˆ˜์šฉํ•  ์ˆ˜ ์žˆ๋Š” ์ˆ˜์šฉ์ฒด ์ค€์œ„๊ฐ€ ์ƒ์„ฑ๋˜์–ด ๋ฌผ์งˆ์ด pํ˜• ๋ฐ˜๋„์ฒด๋กœ ๊ธฐ๋Šฅํ•  ์ˆ˜ ์žˆ๊ฒŒ ๋˜๋ฉด์„œ ๋ฐœ์ƒํ•ฉ๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ํ†ต์ฐฐ๋ ฅ์„ ๋ฐ”ํƒ•์œผ๋กœ ํŒ€์€ ๋ถ€๋ถ„์ ์œผ๋กœ ์‚ฐํ™”๋œ ํ…”๋ฃจ๋ฅด ๋ฐ•๋ง‰๊ณผ ์…€๋ ˆ๋Š„์ด ํฌํ•จ๋œ ํ…”๋ฃจ๋ฅด-์…€๋ ˆ๋Š„ ๋ณตํ•ฉ ์‚ฐํ™”๋ฌผ(Se:TeOx)์„ ํ™œ์šฉํ•˜์—ฌ ๊ณ ์„ฑ๋Šฅ์˜ ๋งค์šฐ ์•ˆ์ •์ ์ธ ๋น„์ •์งˆ pํ˜• ์‚ฐํ™”๋ฌผ ๋ฐ•๋ง‰ ํŠธ๋žœ์ง€์Šคํ„ฐ(TFT)๋ฅผ ์„ฑ๊ณต์ ์œผ๋กœ ์„ค๊ณ„ํ–ˆ์Šต๋‹ˆ๋‹ค.

์‹คํ—˜ ๊ฒฐ๊ณผ์— ๋”ฐ๋ฅด๋ฉด ํŒ€์˜ TFT๋Š” pํ˜• ๋น„์ •์งˆ ์‚ฐํ™”๋ฌผ TFT์— ๋Œ€ํ•ด ๋ณด๊ณ ๋œ ๊ฐ€์žฅ ์ธ์ƒ์ ์ธ ์ •๊ณต ์ด๋™๋„(15 cm 2 V -1 s -1 ) ๋ฐ ์˜จ/์˜คํ”„ ์ „๋ฅ˜ ๋น„์œจ(10 6 -10 7 )์„ ๋‚˜ํƒ€๋ƒ…๋‹ˆ๋‹ค. ์ด๋Ÿฌํ•œ ์„ฑ๊ณผ๋Š” ๊ด‘๋ฒ”์œ„ํ•˜๊ฒŒ ์—ฐ๊ตฌ๋˜์–ด ์˜จ ๊ธฐ์กด nํ˜• ์‚ฐํ™”๋ฌผ ๋ฐ˜๋„์ฒด(IGZO ๋“ฑ)์˜ ์„ฑ๋Šฅ ์ˆ˜์ค€๊ณผ ๊ฑฐ์˜ ์ผ์น˜ํ•ฉ๋‹ˆ๋‹ค.


๋˜ํ•œ ํŒ€์˜ TFT๋Š” ์ „์••, ์ „๋ฅ˜, ๊ณต๊ธฐ ๋ฐ ์Šต๋„์˜ ๋ณ€๋™์„ ํฌํ•จํ•œ ๋‹ค์–‘ํ•œ ์™ธ๋ถ€ ์กฐ๊ฑด์—์„œ๋„ ํƒ์›”ํ•œ ์•ˆ์ •์„ฑ์„ ๋ณด์—ฌ์ฃผ์—ˆ์Šต๋‹ˆ๋‹ค. ํŠนํžˆ, ์›จ์ดํผ๋กœ ์ œ์กฐํ•  ๋•Œ ๋ชจ๋“  TFT ๊ตฌ์„ฑ ์š”์†Œ์— ๊ฑธ์ณ ๊ท ์ผํ•œ ์„ฑ๋Šฅ์ด ๊ด€์ฐฐ๋˜์–ด ์‚ฐ์—… ํ™˜๊ฒฝ์— ์ ์šฉํ•  ์ˆ˜ ์žˆ๋Š” ์‹ ๋ขฐํ•  ์ˆ˜ ์žˆ๋Š” ๋ฐ˜๋„์ฒด ์žฅ์น˜์— ๋Œ€ํ•œ ์ ํ•ฉ์„ฑ์„ ํ™•์ธํ–ˆ์Šต๋‹ˆ๋‹ค.

ํฌ์Šคํ… ๋…ธ์šฉ์˜ ๊ต์ˆ˜๋Š” โ€œ์ด๋ฒˆ ์ด์ •ํ‘œ๋Š” OLED TV, VR, AR ๊ธฐ๊ธฐ ๋“ฑ ์ฐจ์„ธ๋Œ€ ๋””์Šคํ”Œ๋ ˆ์ด ๊ธฐ์ˆ ์€ ๋ฌผ๋ก  ์ €์ „๋ ฅ CMOS, DRAM ๋ฉ”๋ชจ๋ฆฌ ์—ฐ๊ตฌ์—๋„ ์ค‘์š”ํ•œ ์˜๋ฏธ๋ฅผ ๊ฐ–๋Š”๋‹คโ€๊ณ  ๋‚™๊ด€ํ–ˆ๋‹ค. ๊ทธ๋Š” โ€œ๋‹ค์–‘ํ•œ ์‚ฐ์—… ์ „๋ฐ˜์— ๊ฑธ์ณ ์‹ค์งˆ์ ์ธ ๊ฐ€์น˜ ์ฐฝ์ถœ์„ ์ด‰์ง„ํ•  ์ž ์žฌ๋ ฅ์„ ๊ธฐ๋Œ€ํ•œ๋‹คโ€๊ณ  ๋ง๋ถ™์˜€๋‹ค.